FSM3-L
Product ID:52538
Updated: 2026/7/14
Key Features
- 1High Precision Measurement: Achieve accurate flow rate measurements with a response time of 50 msec and repeatability within ±1% F.S.
- 2Versatile Gas Compatibility: Measure five types of gases—air, nitrogen, argon, carbon dioxide, and mixed gases—with a single device.
- 3Robust Environmental Resistance: Designed with IP65 protection, ensuring safe operation in dusty environments and during maintenance.
- 4IO-Link Compatibility: Automate factory processes with the transmission of parameters and event data, enabling Preventative Maintenance.
- 5Compact Design: Integrated needle type contributes to space savings, making it ideal for tight installations in semiconductor manufacturing processes.
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Technical Specifications
Detailed engineering parameters
| Parameter | Value | Parameter | Value |
|---|---|---|---|
| Model no. | FSM3-L | Port size | BH : Push-in (for ø4 mm tube) |
Specifications may be subject to change without notice
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