FSM3-L005U1BH1A1N-A
Product ID:52535
Updated: 2026/7/14
Key Features
- 1High precision with repeatability within ±1% F.S.
- 2User-friendly operation with gas change function via button operations.
- 3Compatible with five types of gases: air, nitrogen, argon, carbon dioxide, and mixed gases (Argon + Carbon dioxide).
- 4Bi-directional fluid measurement contributes to reducing tact time.
- 5Clean-room specifications with anti-dust generation (P70) and oil-prohibited (P80) options available.
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Technical Specifications
Detailed engineering parameters
| Parameter | Value | Parameter | Value |
|---|---|---|---|
| Model no. | FSM3 | Display | L : Liquid crystal display |
| Flow rate range (full scale flow rate) | 005 : 500mL/min | Flow direction | U : Uni-direction |
| Body material/compatible fluids | 1 : Resin, Air (gas switchable) | Port size | BH : Push-in (for φ4 mm tube) |
| Piping direction | 1 : Straight | Piping direction 2 | - |
| Output specifications | A : Analog output 1 point(Voltage) 1 to 5V, Switch output 1 point(NPN), With setting copy function | Unit specifications | 1 : SI units only |
| Valve option | N : None | Lead wire | A : 5 conductor 1 m |
| Mounting attachments | Blank : None | Included documents | Blank : None |
| Clean-room specifications | Blank : None |
Specifications may be subject to change without notice
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