FSM-VFM-H22

Product ID:52540
Updated: 2026/7/14
CKD Corporation FSM-VFM-H22

Key Features

  • 1Extremely compact design for easy installation in small spaces.
  • 2Realized with a platinum sensor chip and silicon micromachining for fast and accurate flow detection.
  • 3Suitable for various applications including leakage inspection, pinhole detection, and gas flow control.
  • 4Free installation position and compatibility with vacuums, making it ideal for diverse industrial settings.
  • 5Includes analog output, digital display, and switch output for comprehensive error detection and flow control.

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Technical Specifications

Detailed engineering parameters

ParameterValueParameterValue
Type
FSM-VFM
Tube O.D.
H22 : φ 1.8 (fiber tube)
Attached
Blank : Without bracket

Specifications may be subject to change without notice

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