VSC-E10-6A6J

Product ID:51703
Updated: 2026/7/14
CKD Corporation VSC-E10-6A6J

Key Features

  • 1High-vacuum performance with a vacuum level of -27.6 in. Hg (-92 kPa) and suction flow rates up to 6.30 SCFM (180 r/x ANR).
  • 2Compact and lightweight design, ideal for restricted mounting spaces.
  • 3Direct acting valve for high-speed and stable response, ensuring quick ON/OFF switching.
  • 4Available in various nozzle diameters (φ4a to φ12a) and thread sizes (M5 to M10A) for versatile applications.
  • 5Suitable for semiconductor manufacturing processes and other high-precision industries.

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Technical Specifications

Detailed engineering parameters

ParameterValueParameterValue
Model no.
VSC-E10-6A6J
M
-mm
A
8mm
D
-mm
D1
6mm
D2
8mm
R
R1/8mm
L1
28mm
L2
24mm
L3
16mm
P
16mm
P1
-mm
P2
-mm
B
64.7mm
E
24.5mm
E1
-mm
E2
-mm
C
-mm
C1
17mm
C2
18.2mm
Opposite side
-mm
F
16mm
Nozzle diameter
1mm
Ultimate vacuum
92kPa
Suction flow
21l/min
Air consumption
34l/min
Weight
36.5g

Specifications may be subject to change without notice

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